Imec manufactures high-quality image detectors for FEI’s scanning electron microscopes

Nanoelectronics research center imec announced today that it has successfully qualified a set of custom high-quality electron detector die products for FEI Company. The dies are manufactured at imec and integrated in FEI’s scanning electron microscopes (SEMs), helping to enhance the tools’ performance and reliability. This milestone achievement is another confirmation of the capability of imec’s 200mm process line, developing and manufacturing custom specialty chip solutions.

Imec developed and processed the back scattered and stem electron sensors according to FEI’s custom designs and specifications, with focus on superior sensitivity to low energy electrons and high reliability.

Imec offers companies all the services needed to turn innovative ideas into customized microsystem products. The imec toolbox contains a wide variety of device technologies on 200mm (e.g. CMOS, Si-photonics, MEMS, image sensors, packaging ...) as well as design, testing and reliability. Imec’s services range from feasibility studies over design and technology development to prototyping and low-volume manufacturing. And through its alliances, imec can also offer a path to transfer the technology to a foundry for volume production.

About imec

Imec performs world-leading research in nanoelectronics. Imec leverages its scientific knowledge with the innovative power of its global partnerships in ICT, healthcare and energy. Imec delivers industry-relevant technology solutions. In a unique high-tech environment, its international top talent is committed to providing the building blocks for a better life in a sustainable society. Imec is headquartered in Leuven, Belgium, and has offices in the Netherlands, Taiwan, US, China, India and Japan. Its staff of over 2,080 people includes more than 670 industrial residents and guest researchers. In 2013, imec's revenue (P&L) totaled 332 million euro. Further information on imec can be found at www.imec.be. Stay up to date about what’s happening at imec with the monthly imec magazine, available for tablets and smartphones (as an app for iOS and Android), or via the website http://www.imec.be/imecmagazine
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shanghai) Co. Ltd.) and imec India (Imec India Private Limited).

Contact

Hanne Degans, Press officer and communications specialist, T: +32 16 28 17 69, Mobile: +32 486 06 51 75, hanne.degans@imec.be